From vilanova at snf.stanford.edu Mon Aug 1 08:38:14 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Aug 2011 08:38:14 -0700 Subject: Problem svgcoat2 SNF 2011-07-31 13:44:50: Track 2 drain alarm Message-ID: Resist Gallon Ws almost Empty, Replaced and Tested , No more alarms, Ok to use. From cachang at snf.stanford.edu Mon Aug 1 17:45:02 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Mon, 1 Aug 2011 17:45:02 -0700 Subject: Problem svgcoat2 SNF 2011-08-01 17:45:01: failed to send wafers from sender cassette Message-ID: The track failed to send wafer from the sender. Reset track returned controller failures. From vilanova at snf.stanford.edu Tue Aug 2 08:04:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Aug 2011 08:04:59 -0700 Subject: Problem svgcoat2 SNF 2011-08-01 17:45:01: failed to send wafers from sender cassette Message-ID: Once Again Someone Reset the track From the main Control panel Instead of doing it from the Computer, Performed a full reinitialize test and cycled wafers, Ok to use. From jparker at snf.stanford.edu Wed Aug 3 14:23:40 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 3 Aug 2011 14:23:40 -0700 Subject: Problem svgcoat2 SNF 2011-08-03 14:23:40: Bubbles, disp1 Message-ID: Air bubbles early in the line near the source bottle for 3612 (disp1). From narii at snf.stanford.edu Mon Aug 8 21:29:42 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 8 Aug 2011 21:29:42 -0700 Subject: Problem svgcoat2 SNF 2011-08-08 21:29:41: computer crashed Message-ID: have to manually load programs From vilanova at snf.stanford.edu Tue Aug 9 08:47:16 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Aug 2011 08:47:16 -0700 Subject: Problem svgcoat2 SNF 2011-08-08 21:29:41: computer crashed Message-ID: Re initialized PC and tested, Ok to use. Cleaned catch cup wafers and Chuck , Hotplate From vilanova at snf.stanford.edu Tue Aug 9 09:25:01 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Aug 2011 09:25:01 -0700 Subject: Problem svgcoat2 SNF 2011-08-03 14:23:40: Bubbles, disp1 Message-ID: Ive been checking the Dispense for the last couple of days, The dispense line was pinched Under the system I followed the line and fixed it , Bubble is gone, Cleaned wafers and tested, Uniformity Looks Good, ok to use. From vilanova at snf.stanford.edu Tue Aug 9 09:25:34 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Aug 2011 09:25:34 -0700 Subject: Comment svgcoat2 SNF 2011-08-09 09:25:33: cleaned catch cup wafers hotplate chucks and belts Message-ID: From cachang at snf.stanford.edu Tue Aug 9 20:57:45 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Tue, 9 Aug 2011 20:57:45 -0700 Subject: Problem svgcoat2 SNF 2011-08-09 20:57:45: vapor prime Message-ID: Monitor showed HPO/VP VAC BREAK STRT when I ran 1um PR with VP and 2mm EBR. From gsosa at snf.stanford.edu Wed Aug 10 08:25:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Aug 2011 08:25:55 -0700 Subject: Problem svgcoat2 SNF 2011-08-09 20:57:45: vapor prime Message-ID: Was able to reproduce the users problem in the Vapor prime module. Vacuum sensor error when lowering the wafer to the hotplate surface. Inspected and cleaned the hotplate surface. Checked lifter at lower position- Looked slightly high. Performed HPO lifter calibration and verified that lifter height was below grooves in hotplate. Checked track operation, with vapor prime. All OK. From mtan at snf.stanford.edu Sat Aug 13 14:36:13 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 13 Aug 2011 14:36:13 -0700 Subject: Problem svgcoat2 SNF 2011-08-13 14:36:13: spindle on top error can't start Message-ID: From mtan at snf.stanford.edu Sat Aug 13 14:58:57 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 13 Aug 2011 14:58:57 -0700 Subject: Problem svgcoat2 SNF 2011-08-13 14:58:57: it's working now Message-ID: From vilanova at snf.stanford.edu Mon Aug 15 06:58:10 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Aug 2011 06:58:10 -0700 Subject: Problem svgcoat2 SNF 2011-08-13 14:36:13: spindle on top error can't start Message-ID: User Probably Forgot to enable it. From vilanova at snf.stanford.edu Mon Aug 15 06:58:20 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Aug 2011 06:58:20 -0700 Subject: Problem svgcoat2 SNF 2011-08-13 14:58:57: it's working now Message-ID: User Probably Forgot to enable it. From edfei at snf.stanford.edu Mon Aug 15 15:19:02 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:19:02 -0700 Subject: Problem svgcoat2 SNF 2011-08-15 15:19:02: 3612 1.0um uneven Message-ID: wafer came out with uneven coverage From vilanova at snf.stanford.edu Tue Aug 16 08:06:46 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 08:06:46 -0700 Subject: Problem svgcoat2 SNF 2011-08-15 15:19:02: 3612 1.0um uneven Message-ID: Ive ran several wafers ( blank Wafers not exposed) and uniformity Looks Good On all of them ( 6 each ) Ok to use. From zpatel at snf.stanford.edu Fri Aug 19 17:04:23 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 19 Aug 2011 17:04:23 -0700 Subject: Shutdown svgcoat2 SNF 2011-08-19 17:04:23: monitor blank Message-ID: From uli at snf.stanford.edu Fri Aug 19 17:29:53 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Aug 2011 17:29:53 -0700 Subject: Shutdown svgcoat2 SNF 2011-08-19 17:04:23: monitor blank Message-ID: Monitor is on again. From wslee at snf.stanford.edu Sun Aug 21 01:03:13 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 21 Aug 2011 01:03:13 -0700 Subject: Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers Message-ID: I tried to run recipe '7 1.0um w/o VP 2mm EBR' but the wafers would not transfer from the sender cassette. From jparker at snf.stanford.edu Sun Aug 21 17:56:07 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sun, 21 Aug 2011 17:56:07 -0700 Subject: Comment svgcoat2 SNF 2011-08-21 17:56:07: Fixed: 8/21 transfer problem Message-ID: FIXED: 8/21 1pm reported problem. Two sets of 3+ wafers using prog 7 run successfully. DETAILS: "Transfer stop" on Prime station was toggled on, preventing the send indexer from transferring. The software track reset (from last pages of documentation) cleared it ("start" on the hardware keypad for Prime station surprisingly did not). From vossough at snf.stanford.edu Sun Aug 21 19:50:20 2011 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sun, 21 Aug 2011 19:50:20 -0700 Subject: Comment svgcoat2 SNF 2011-08-21 19:50:20: Will not transfer wafer.... Message-ID: same problem descrobed by user wslee on 2011/8/21 From vilanova at snf.stanford.edu Mon Aug 22 08:03:14 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Aug 2011 08:03:14 -0700 Subject: Shutdown svgcoat2 SNF 2011-08-22 08:03:14: Broken HMDS Hotplate rail Lifter Message-ID: Repairing Broken HMDS Hotplate rail Lifter. From gsosa at snf.stanford.edu Mon Aug 22 14:39:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Aug 2011 14:39:18 -0700 Subject: Shutdown svgcoat2 SNF 2011-08-22 08:03:14: Broken HMDS Hotplate rail Lifter Message-ID: Motor mounts on lifter motor broken. Replaced motor mounts. Installed new motor/leadscrew assembly. Tested vapor prime mechanical operation- OK. Tested track operation- All OK. From gsosa at snf.stanford.edu Mon Aug 22 14:39:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Aug 2011 14:39:24 -0700 Subject: Comment svgcoat2 SNF 2011-08-21 19:50:20: Will not transfer wafer.... Message-ID: Motor mounts on lifter motor broken. Replaced motor mounts. Installed new motor/leadscrew assembly. Tested vapor prime mechanical operation- OK. Tested track operation- All OK. From gsosa at snf.stanford.edu Mon Aug 22 14:39:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Aug 2011 14:39:29 -0700 Subject: Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers Message-ID: Motor mounts on lifter motor broken. Replaced motor mounts. Installed new motor/leadscrew assembly. Tested vapor prime mechanical operation- OK. Tested track operation- All OK. From gsosa at snf.stanford.edu Mon Aug 22 14:39:33 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Aug 2011 14:39:33 -0700 Subject: Comment svgcoat2 SNF 2011-08-21 17:56:07: Fixed: 8/21 transfer problem Message-ID: Motor mounts on lifter motor broken. Replaced motor mounts. Installed new motor/leadscrew assembly. Tested vapor prime mechanical operation- OK. Tested track operation- All OK. From zguo at snf.stanford.edu Wed Aug 24 22:22:25 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Wed, 24 Aug 2011 22:22:25 -0700 Subject: Problem svgcoat2 SNF 2011-08-24 22:22:25: very non uniform coating Message-ID: 7: 1.0um WO/VP no EBR 7: 1.0um WO/VP 2mm EBR From vilanova at snf.stanford.edu Thu Aug 25 09:32:34 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2011 09:32:34 -0700 Subject: Problem svgcoat2 SNF 2011-08-24 22:22:25: very non uniform coating Message-ID: Cleaned catch cup and dummy wafers , Belts, hotplate, Checked Resist bottle, Cycled Clean Wafers , Uniformity Good, Ready to use. From dasgupta at snf.stanford.edu Thu Aug 25 16:50:34 2011 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Thu, 25 Aug 2011 16:50:34 -0700 Subject: Problem svgcoat2 SNF 2011-08-25 16:50:33: Reciever station problem Message-ID: problem with reciever station: if there is one or more wafers in the casette when you start a process, the reciever station is unable to sense the wafers and will not stay in the "down" position. If it is an empty casette, it will work ok. From vilanova at snf.stanford.edu Fri Aug 26 07:51:34 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:51:34 -0700 Subject: Problem svgcoat2 SNF 2011-08-25 16:50:33: Reciever station problem Message-ID: Someone Pressed the wrong Start Button On the screen , Instead of Pressing "start" the Full Lot Button got Pressed Down, Reinitialized system Pressed Start button and cycled all the dummy wafers , cleaned wafers, All operations are Ok. From carterlin at snf.stanford.edu Mon Aug 29 15:00:24 2011 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Mon, 29 Aug 2011 15:00:24 -0700 Subject: Problem svgcoat2 SNF 2011-08-29 15:00:24: big air bubble in 3612 line right out of tank Message-ID: From gsosa at snf.stanford.edu Mon Aug 29 16:10:10 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Aug 2011 16:10:10 -0700 Subject: Problem svgcoat2 SNF 2011-08-29 15:00:24: big air bubble in 3612 line right out of tank Message-ID: Purged air bubble out of dispense line. Tested out OK. From jparker at snf.stanford.edu Wed Aug 31 09:20:58 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 31 Aug 2011 09:20:58 -0700 Subject: Comment svgcoat2 SNF 2011-08-31 09:20:58: Disp1 bubble Message-ID: 1" long bubble in the line right at bottle. Line purged, but there seems to be a recurring air leak that may need a look.