Problem svgcoat2 SNF 2011-08-01 17:45:01: failed to send wafers from sender cassette

cachang at snf.stanford.edu cachang at snf.stanford.edu
Mon Aug 1 17:45:02 PDT 2011


The track failed to send wafer from the sender. Reset track returned controller failures.




More information about the svgcoat2-pcs mailing list