Problem svgcoat2 SNF 2011-08-03 14:23:40: Bubbles, disp1

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Aug 9 09:25:01 PDT 2011


Ive been checking the Dispense for the last couple of days, The
dispense line was pinched  Under the system I followed the line and 
fixed it , Bubble is gone, Cleaned wafers and tested, Uniformity Looks Good, ok to use. 




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