Problem svgcoat2 SNF 2011-08-09 20:57:45: vapor prime

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 10 08:25:55 PDT 2011


Was able to reproduce the users problem in the Vapor prime module. Vacuum sensor error when lowering the wafer to the hotplate surface. Inspected and cleaned the hotplate surface. Checked lifter at lower position- Looked slightly high. Performed HPO lifter calibration and verified that lifter height was below grooves in hotplate. Checked track operation, with vapor prime. All OK.




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