Shutdown svgcoat2 SNF 2011-08-19 17:04:23: monitor blank
uli at snf.stanford.edu
uli at snf.stanford.edu
Fri Aug 19 17:29:53 PDT 2011
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Shutdown svgcoat2 SNF 2011-08-19 17:04:23: monitor blank
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Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers
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Monitor is on again.
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Shutdown svgcoat2 SNF 2011-08-19 17:04:23: monitor blank
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Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers
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