Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Aug 21 01:03:13 PDT 2011


I tried to run recipe '7 1.0um w/o VP 2mm EBR' but the wafers would not transfer from the sender cassette. 




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