Problem svgcoat2 SNF 2011-08-21 01:03:12: Will not transfer wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 22 14:39:29 PDT 2011


Motor mounts on lifter motor broken. Replaced motor mounts. Installed new motor/leadscrew assembly.  Tested vapor prime mechanical operation- OK. Tested track operation- All OK.




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