Problem svgcoat2 SNF 2011-08-24 22:22:25: very non uniform coating

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 25 09:32:34 PDT 2011


Cleaned catch cup and dummy wafers , Belts, hotplate, 
Checked Resist bottle, Cycled Clean Wafers , Uniformity Good,
Ready to use. 




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