Problem svgcoat2 SNF 2011-08-25 16:50:33: Reciever station problem

dasgupta at snf.stanford.edu dasgupta at snf.stanford.edu
Thu Aug 25 16:50:34 PDT 2011


problem with reciever station: if there is one or more wafers in the casette when you start a process, the reciever station is unable to sense the wafers and will not stay in the "down" position.  If it is an empty casette, it will work ok.




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