Problem svgcoat2 SNF 2011-12-02 05:40:36: is not working

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 2 08:12:38 PST 2011


Secondary Contaiment ( small container under the coat system , Found Full , EMptied and restarted the system ( track reset ) From 
" THE COMPUTER" Cycled all dummy wafers and cleaned catch cup hotplates belts chucks and wafers, Ran A total of 20 wafers, All
Operations are Okm., Good to use. 




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