Problem svgcoat2 SNF 2011-12-09 05:47:44: 2mm EBR didn't clear

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Dec 9 05:47:44 PST 2011


running 1.6um with 2mm EBR and found resist in EBR region and on wafer backside around perimeter.  




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