Problem svgcoat2 SNF 2011-12-09 05:47:44: 2mm EBR didn't clear

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 9 08:01:15 PST 2011


EBR Canister was Little bit Low,  Also there was a Big Air gap In the
resist dispense hose, 
!) Added EBR To Canister
2) Cleaned Dummy wafers and Catch cup
3) ran Clean Dummy wafers Using the  Same Recipe the User
was having problems with ......... Air Gap Gone EBR Working Fine
Uniformity Looks Good, Ok to use. 




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