From jasonlin at snf.stanford.edu Tue Feb 1 19:57:38 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 1 Feb 2011 19:57:38 -0800 Subject: Problem svgcoat2 SNF 2011-02-01 19:57:37: Wafer stuck on resist spinner Message-ID: Alarmed and message was upstream not ready. There are no spinning tracks and I couldn't get the system to move the wafer. Left it in yellow in case someone is successful at getting the wafer off. From vilanova at snf.stanford.edu Wed Feb 2 10:41:04 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Feb 2011 10:41:04 -0800 Subject: Problem svgcoat2 SNF 2011-02-01 19:57:37: Wafer stuck on resist spinner Message-ID: Adjusted solenoid Valve and cycled wafers ,ok to use. From kokab at snf.stanford.edu Sun Feb 6 14:41:32 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 6 Feb 2011 14:41:32 -0800 Subject: Problem svgcoat2 SNF 2011-02-06 14:41:31: doesn't work Message-ID: From ericp at snf.stanford.edu Sun Feb 6 17:02:08 2011 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 6 Feb 2011 17:02:08 -0800 Subject: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks Message-ID: Both tracks were erroring on "HPO". I took that to mean "Hot plate oven". The problems on SVGCOAT1 and 2 are similar but slightly different. On SVGCOAT1, the rails on the (disabled) vapor prime station are getting stuck in the OUT position. They start to come in, and then hang, which causes the alarm. On SVGCOAT2, the lifter on the VP station is sticking in a similar fashion. Perhaps they both require lubrication. Both tracks are operating now, but it seems that when they sit for a few hours, it starts sticking again. Kokab is running a large batch through right now, and they are both working fine. But I'm certain the problem will occur again if not dealt with. From haemmerl at snf.stanford.edu Mon Feb 7 19:48:01 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Mon, 7 Feb 2011 19:48:01 -0800 Subject: Problem svgcoat2 SNF 2011-02-07 19:48:01: controller problem Message-ID: Unable to control the track using the computer. Tried manually with the console, but the sender cassette didn't wat to lower down. The receiver cassette did lower...!? From vilanova at snf.stanford.edu Tue Feb 8 07:00:17 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Feb 2011 07:00:17 -0800 Subject: Problem svgcoat2 SNF 2011-02-07 19:48:01: controller problem Message-ID: SOMEONE WAS USING THE OPTION "TRACK # 1) ON COMPUTER TRACK # 2THIS WILL OBVIOUSLY MESS UP BOTH OF THEM, PLEASE MAKE SURE YOURE USING COMPUTER # 1 FOR TRACK #1 AND COMPUTER # 2 FOR TRACK # 2, IF YOU NEED HELP ASK!! From vilanova at snf.stanford.edu Tue Feb 8 07:00:30 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Feb 2011 07:00:30 -0800 Subject: Problem svgcoat2 SNF 2011-02-06 14:41:31: doesn't work Message-ID: SOMEONE WAS USING THE OPTION "TRACK # 1) ON COMPUTER TRACK # 2THIS WILL OBVIOUSLY MESS UP BOTH OF THEM, PLEASE MAKE SURE YOURE USING COMPUTER # 1 FOR TRACK #1 AND COMPUTER # 2 FOR TRACK # 2, IF YOU NEED HELP ASK!! From grahamab at snf.stanford.edu Wed Feb 16 10:30:46 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 16 Feb 2011 10:30:46 -0800 Subject: Comment svgcoat2 SNF 2011-02-16 10:30:45: spiral pattern using 1um 3612 Message-ID: even after running 5 dummies, continued to get a spiral pattern using 1um 3612 with 2mm EBR. very noticable just off center of wafer and then spirals out a bit before being hard to see. finally went away on the 10th and final wafer. From vilanova at snf.stanford.edu Wed Feb 16 13:37:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Feb 2011 13:37:12 -0800 Subject: Comment svgcoat2 SNF 2011-02-16 10:30:45: spiral pattern using 1um 3612 Message-ID: cleaned up all dummy wafers and cycled same recipe, all my wafers came out good , uniformity looks good , ok to use. From elibol at snf.stanford.edu Thu Feb 24 09:09:59 2011 From: elibol at snf.stanford.edu (elibol at snf.stanford.edu) Date: Thu, 24 Feb 2011 09:09:59 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 09:09:59: Complains about problem with controller Message-ID: From vilanova at snf.stanford.edu Thu Feb 24 11:31:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Feb 2011 11:31:02 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 09:09:59: Complains about problem with controller Message-ID: Cleaned Up Resist From HMDS Hotplate Lubricated and tested, Cycled and Cleaned All the Dummy wafers Box, Ok to use Please Do NOt power Off from the track Main Controller, If you have a problem just Press " Track Star" From the Computer, Report Problems On Coral . From elvislin at snf.stanford.edu Thu Feb 24 15:35:27 2011 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Thu, 24 Feb 2011 15:35:27 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 15:35:26: primer need fix Message-ID: the rail is not aligned with the trench. need fix and test. From elvislin at snf.stanford.edu Thu Feb 24 15:41:52 2011 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Thu, 24 Feb 2011 15:41:52 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 15:41:51: primer issue fixed Message-ID: From gsosa at snf.stanford.edu Fri Feb 25 06:57:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:57:44 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 15:35:26: primer need fix Message-ID: Re-aligned the wafer lifters and tested From gsosa at snf.stanford.edu Fri Feb 25 06:57:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:57:49 -0800 Subject: Problem svgcoat2 SNF 2011-02-24 15:41:51: primer issue fixed Message-ID: Re-aligned the wafer lifters and tested