Problem svgcoat2 SNF 2011-02-01 19:57:37: Wafer stuck on resist spinner

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Feb 1 19:57:38 PST 2011


Alarmed and message was upstream not ready.  There are no spinning tracks and I couldn't get the system to move the wafer.  Left it in yellow in case someone is successful at getting the wafer off.




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