Comment svgcoat2 SNF 2011-02-16 10:30:45: spiral pattern using 1um 3612

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed Feb 16 10:30:46 PST 2011


even after running 5 dummies, continued to get a spiral pattern using 1um 3612 with 2mm EBR.  very noticable just off center of wafer and then spirals out a bit before being hard to see.  finally went away on the 10th and final wafer.   




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