Comment svgcoat2 SNF 2011-02-16 10:30:45: spiral pattern using 1um 3612

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 16 13:37:12 PST 2011


cleaned up all dummy wafers and cycled same recipe, all my
wafers came out good , uniformity looks good , ok to use. 




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