From mahnaz at snf.stanford.edu Wed Jan 5 11:05:16 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Jan 2011 11:05:16 -0800 Subject: Problem svgcoat2 SNF 2011-01-05 11:05:15: speed boat Message-ID: ran 4 dummies all 4 wafers came out with huge speed boat. From maxms at snf.stanford.edu Fri Jan 7 23:04:20 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Fri, 7 Jan 2011 23:04:20 -0800 Subject: Comment svgcoat2 SNF 2011-01-07 23:04:19: 3612 1um working fine Message-ID: after running several dummies, coating is very uniform From mahnaz at snf.stanford.edu Mon Jan 10 09:59:41 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 09:59:41 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 09:59:41: 1.6 um huge speed boat Message-ID: Ran 5 dummies and cleaned the nozzle. Out of 11 wafers only two came out good the rest has huge speed boat on them. From mahnaz at snf.stanford.edu Mon Jan 10 10:00:49 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:00:49 -0800 Subject: Problem svgcoat2 SNF 2010-12-12 19:39:19: something wrong with transfer to vapor prime station Message-ID: i like to clear this and start fresh. a lot of work has been done on the track during shut down. From mahnaz at snf.stanford.edu Mon Jan 10 10:01:11 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:01:11 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 07:15:16: wafer transfer problem Message-ID: too old From mahnaz at snf.stanford.edu Mon Jan 10 10:01:33 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:01:33 -0800 Subject: Problem svgcoat2 SNF 2010-11-04 17:26:14: Prime station wafer lifter still sticking Message-ID: too old. From mahnaz at snf.stanford.edu Mon Jan 10 10:01:45 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:01:45 -0800 Subject: Problem svgcoat2 SNF 2010-11-11 19:29:21: vapor prime chuck sticky Message-ID: cleaned From mahnaz at snf.stanford.edu Mon Jan 10 10:02:04 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:02:04 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 02:44:42: wafer doesn't proceed along track Message-ID: taken care of From mahnaz at snf.stanford.edu Mon Jan 10 10:02:28 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 10:02:28 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 03:28:43: "upstream not ready" Message-ID: reset has been performed. From jsegal at snf.stanford.edu Mon Jan 10 14:11:44 2011 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Mon, 10 Jan 2011 14:11:44 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 14:11:43: streaking Message-ID: Intermittant resist streaking using 1.0um 3612 From mahnaz at snf.stanford.edu Mon Jan 10 14:32:50 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 14:32:50 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 14:32:50: still streak in 3612 Message-ID: Gary worked on the track and the streak much better than before in 1.6 um but when I ran 3612 1um did not look good. I tested the 955 on the same track different dispense looks very uniform. From calarrudo at snf.stanford.edu Wed Jan 19 03:22:20 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 19 Jan 2011 03:22:20 -0800 Subject: Problem svgcoat2 SNF 2011-01-19 03:22:19: Track 2 Message-ID: Multiple reworks for streaks and bad coat. From mahnaz at snf.stanford.edu Wed Jan 19 11:11:44 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 19 Jan 2011 11:11:44 -0800 Subject: Problem svgcoat2 SNF 2011-01-19 11:11:44: tip of nozzel 3612 needs to be cut Message-ID: straight. and slight improvment on suck back. Ran dummies cleaned tip , all wafers with 1 um and 1.6 um came out with speed boat and bad uniformity. From mahnaz at snf.stanford.edu Wed Jan 19 11:35:30 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 19 Jan 2011 11:35:30 -0800 Subject: Comment svgcoat2 SNF 2011-01-19 11:35:30: cleaned all the dummies. Message-ID: From gsosa at snf.stanford.edu Fri Jan 21 10:19:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:19:49 -0800 Subject: Problem svgcoat2 SNF 2011-01-05 11:05:15: speed boat Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From gsosa at snf.stanford.edu Fri Jan 21 10:19:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:19:59 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 09:59:41: 1.6 um huge speed boat Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From gsosa at snf.stanford.edu Fri Jan 21 10:20:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:20:06 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 14:11:43: streaking Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From gsosa at snf.stanford.edu Fri Jan 21 10:20:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:20:12 -0800 Subject: Problem svgcoat2 SNF 2011-01-10 14:32:50: still streak in 3612 Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From gsosa at snf.stanford.edu Fri Jan 21 10:20:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:20:20 -0800 Subject: Problem svgcoat2 SNF 2011-01-19 11:11:44: tip of nozzel 3612 needs to be cut Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From gsosa at snf.stanford.edu Fri Jan 21 10:20:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:20:34 -0800 Subject: Problem svgcoat2 SNF 2011-01-19 03:22:19: Track 2 Message-ID: Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B. Target Thickness: 1.0 micron Mean: 10210 Angstroms Std dev: 14 Angstroms From mahnaz at snf.stanford.edu Fri Jan 21 11:09:11 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 21 Jan 2011 11:09:11 -0800 Subject: Comment svgcoat2 SNF 2011-01-21 11:09:10: Zpatel is running 3612 Message-ID: and looks very good. No speed boat on the wfs at all. yohooo