Problem svgcoat2 SNF 2011-01-10 09:59:41: 1.6 um huge speed boat

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Jan 10 09:59:41 PST 2011


Ran 5 dummies  and cleaned the nozzle.
Out of 11 wafers only two came out good the rest has huge speed boat on them.




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