Problem svgcoat2 SNF 2011-01-19 11:11:44: tip of nozzel 3612 needs to be cut

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 21 10:20:20 PST 2011


Checked and re-trimmed the nozzle tip square. Checked and adjusted the dispense pump. Slowed the dispense down and decreased the stroke. Checked and adjusted suckback. Coated 10 wafers with 1.0 micron program- No visual defects in resist. Checked and recorded thickness results in Coral D/B.
   Target Thickness: 1.0 micron
   Mean: 10210 Angstroms
   Std dev: 14 Angstroms




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