From vilanova at snf.stanford.edu Fri Jul 1 08:20:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Jul 2011 08:20:19 -0700 Subject: Comment svgcoat2 SNF 2011-06-30 18:28:04: wafer no longer stuck. Message-ID: When the tracks message read " Spindle up ?" means track is not enable or track was disable while running, Ive tested the tracks and users ran wafers after the Problem was reported late yesyerday afternoon and all their wafers went through fine, Cleaned up the catch cup and dummy wafers, Tested track Again, everything Fine, Ok to use. From vilanova at snf.stanford.edu Fri Jul 1 08:20:24 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Jul 2011 08:20:24 -0700 Subject: Problem svgcoat2 SNF 2011-06-30 18:00:36: wafer stuck in vapor prime station Message-ID: When the tracks message read " Spindle up ?" means track is not enable or track was disable while running, Ive tested the tracks and users ran wafers after the Problem was reported late yesyerday afternoon and all their wafers went through fine, Cleaned up the catch cup and dummy wafers, Tested track Again, everything Fine, Ok to use. From ehe at snf.stanford.edu Fri Jul 1 19:05:54 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 1 Jul 2011 19:05:54 -0700 Subject: Problem svgcoat2 SNF 2011-07-01 19:05:53: computer/logic problem? Message-ID: wafers are not running through without some alarm/problem. doesn't matter whether run w/ or w/out vp From narii at snf.stanford.edu Sat Jul 2 22:03:27 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 2 Jul 2011 22:03:27 -0700 Subject: Problem svgcoat2 SNF 2011-07-02 22:03:26: VP problem? Message-ID: Unable to pass VP while running recipe 5. VP not responsive at all From gsosa at snf.stanford.edu Sun Jul 3 12:43:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 3 Jul 2011 12:43:39 -0700 Subject: Problem svgcoat2 SNF 2011-07-01 19:05:53: computer/logic problem? Message-ID: Vapor prime wafer lifters stuck in down position. This usually happens when the track is reset by cycling the power on the SVG controller. Un-stuck the lifters and reset the track hardware through the PC. Tested track operation-All OK. From gsosa at snf.stanford.edu Sun Jul 3 12:43:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 3 Jul 2011 12:43:43 -0700 Subject: Problem svgcoat2 SNF 2011-07-02 22:03:26: VP problem? Message-ID: Vapor prime wafer lifters stuck in down position. This usually happens when the track is reset by cycling the power on the SVG controller. Un-stuck the lifters and reset the track hardware through the PC. Tested track operation-All OK. From lindaw at snf.stanford.edu Tue Jul 5 12:35:12 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 5 Jul 2011 12:35:12 -0700 Subject: Problem svgcoat2 SNF 2011-07-05 12:35:11: hmds low alarm Message-ID: From vilanova at snf.stanford.edu Tue Jul 5 13:31:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 Jul 2011 13:31:37 -0700 Subject: Problem svgcoat2 SNF 2011-07-05 12:35:11: hmds low alarm Message-ID: refilled canister and tested, cleaned chuck belts catch cup and dummy wafers, tested again, Ok to use. From gsosa at snf.stanford.edu Thu Jul 7 09:19:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:19:35 -0700 Subject: Comment svgcoat2 SNF 2011-07-07 09:19:34: 955-0.7 Thickness Test 7/7 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 7076 Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From wanglele501 at snf.stanford.edu Tue Jul 12 18:14:50 2011 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Tue, 12 Jul 2011 18:14:50 -0700 Subject: Shutdown svgcoat2 SNF 2011-07-12 18:14:49: wafer broken Message-ID: Wafer broken during spinning photoresist. Pieces stay in the bowl. From vilanova at snf.stanford.edu Wed Jul 13 06:45:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jul 2011 06:45:19 -0700 Subject: Shutdown svgcoat2 SNF 2011-07-12 18:14:49: wafer broken Message-ID: Removed Wafers From Chuck and catch cup , Cleaned Catch cup belts hotplate chill Plate , Cleaned Dummy wafers, Cycled Wafers Using 1.0um Recipe , Uniformity looks Good, System Ok , Good to use. From hsyoon at snf.stanford.edu Wed Jul 13 14:58:58 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Wed, 13 Jul 2011 14:58:58 -0700 Subject: Problem svgcoat2 SNF 2011-07-13 14:58:57: rmv wafer @ HPO/VP start Message-ID: error but no wafer on the track From gsosa at snf.stanford.edu Wed Jul 13 16:11:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 Jul 2011 16:11:32 -0700 Subject: Problem svgcoat2 SNF 2011-07-13 14:58:57: rmv wafer @ HPO/VP start Message-ID: reset vapor prime module and tested system From vilanova at snf.stanford.edu Thu Jul 14 08:43:48 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 08:43:48 -0700 Subject: Comment svgcoat2 SNF 2011-07-14 08:43:47: Cleaned Up HMDS Plate ...... Message-ID: Cleaned Up Resist From HMDS Station, Cleaned Belts Chuck , Catch cup , dummy wafers , Chill Plate From fpurkl at snf.stanford.edu Fri Jul 15 11:26:08 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 15 Jul 2011 11:26:08 -0700 Subject: Problem svgcoat2 SNF 2011-07-15 11:26:08: Alarm sounds Message-ID: When running 1.6um 3612 the empty bottle alarm sounds for every wafer even though the bottle has just been changed and is full From fpurkl at snf.stanford.edu Fri Jul 15 12:00:58 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 15 Jul 2011 12:00:58 -0700 Subject: Problem svgcoat2 SNF 2011-07-15 12:00:57: 1.6um 3612 - Spot in the middle Message-ID: 4 out of 6 wafers (after running 4 dummies) have a spot in the center of the wafer with supposably less resist when running 1.6um 36112 From vilanova at snf.stanford.edu Fri Jul 15 14:08:04 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:08:04 -0700 Subject: Problem svgcoat2 SNF 2011-07-15 11:26:08: Alarm sounds Message-ID: 1) Alarm Sound = Purged Line and Reposition The sensor, NO more alarms. 2) Uniformity = NOticed the dispense hose was way to close to wafer , therefore wafers Uniformity was bad , adjusted dispense hose and cycled wafers ( 6 each ) all of my wafers came out Good, Uniformity Looks Good and theres no spot on the center of the wafers , System Ok good to use. From vilanova at snf.stanford.edu Fri Jul 15 14:08:10 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:08:10 -0700 Subject: Problem svgcoat2 SNF 2011-07-15 12:00:57: 1.6um 3612 - Spot in the middle Message-ID: 1) Alarm Sound = Purged Line and Reposition The sensor, NO more alarms. 2) Uniformity = NOticed the dispense hose was way to close to wafer , therefore wafers Uniformity was bad , adjusted dispense hose and cycled wafers ( 6 each ) all of my wafers came out Good, Uniformity Looks Good and theres no spot on the center of the wafers , System Ok good to use. From wanglele501 at snf.stanford.edu Tue Jul 19 22:31:54 2011 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Tue, 19 Jul 2011 22:31:54 -0700 Subject: Comment svgcoat2 SNF 2011-07-19 22:31:54: one wafer broken and a little piece drop near the receiver Message-ID: one wafer was broken and a little piece drop near the receiver area From dkozak at snf.stanford.edu Wed Jul 20 03:20:38 2011 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Wed, 20 Jul 2011 03:20:38 -0700 Subject: Problem svgcoat2 SNF 2011-07-20 03:20:38: System screen frozen Message-ID: Tried to use the track, and the system is frozen in "track card cage Panel" mode. From gsosa at snf.stanford.edu Wed Jul 20 07:55:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Jul 2011 07:55:07 -0700 Subject: Comment svgcoat2 SNF 2011-07-19 22:31:54: one wafer broken and a little piece drop near the receiver Message-ID: Inspected and tested track- OK From gsosa at snf.stanford.edu Wed Jul 20 07:55:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Jul 2011 07:55:37 -0700 Subject: Problem svgcoat2 SNF 2011-07-20 03:20:38: System screen frozen Message-ID: Reset the computer and track hardware. Tested track operation- OK From vilanova at snf.stanford.edu Thu Jul 28 08:48:08 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2011 08:48:08 -0700 Subject: Comment svgcoat2 SNF 2011-07-28 08:48:07: CLEANED CATCH CUP HOTPLATE AND CHUCK , CLEANED DUMMY WAFERS Message-ID: CLEANED CATCH CUP, DUMMY WAFERS HOTPLATE AND BELTS. From dongrip at snf.stanford.edu Sun Jul 31 13:44:51 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 31 Jul 2011 13:44:51 -0700 Subject: Problem svgcoat2 SNF 2011-07-31 13:44:50: Track 2 drain alarm Message-ID: buzz-on