Problem svgcoat2 SNF 2011-06-30 18:00:36: wafer stuck in vapor prime station

vilanova at vilanova at
Fri Jul 1 08:20:24 PDT 2011

When the tracks message read " Spindle up ?" means track is not 
enable or track was disable while running, Ive tested the tracks
and users ran wafers after the Problem was reported late yesyerday 
afternoon and  all their wafers  went through fine, Cleaned up the catch 
cup and dummy wafers, Tested track Again, everything Fine, Ok to use. 

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