Problem svgcoat2 SNF 2011-07-01 19:05:53: computer/logic problem?

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Jul 3 12:43:39 PDT 2011


Vapor prime wafer lifters stuck in down position. This usually happens when the track is reset by cycling the power on the SVG controller. Un-stuck the lifters and reset the track hardware through the PC. Tested track operation-All OK.




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