Comment svgcoat2 SNF 2011-07-07 09:19:34: 955-0.7 Thickness Test 7/7

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jul 7 09:19:35 PDT 2011


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 7076  Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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