Shutdown svgcoat2 SNF 2011-07-12 18:14:49: wafer broken

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jul 13 06:45:19 PDT 2011


Removed Wafers From Chuck and catch cup , Cleaned Catch cup belts hotplate chill Plate , Cleaned Dummy wafers, Cycled Wafers Using 
1.0um Recipe , Uniformity looks Good, System Ok , Good to use. 




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