Problem svgcoat2 SNF 2011-07-13 14:58:57: rmv wafer @ HPO/VP start
hsyoon at snf.stanford.edu
hsyoon at snf.stanford.edu
Wed Jul 13 14:58:58 PDT 2011
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Shutdown svgcoat2 SNF 2011-07-12 18:14:49: wafer broken
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Problem svgcoat2 SNF 2011-07-13 14:58:57: rmv wafer @ HPO/VP start
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error but no wafer on the track
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Shutdown svgcoat2 SNF 2011-07-12 18:14:49: wafer broken
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Problem svgcoat2 SNF 2011-07-13 14:58:57: rmv wafer @ HPO/VP start
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