Problem svgcoat2 SNF 2011-07-15 11:26:08: Alarm sounds

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Fri Jul 15 11:26:08 PDT 2011


When running 1.6um 3612 the empty bottle alarm sounds for every wafer even though the bottle has just been changed and is full




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