Problem svgcoat2 SNF 2011-07-15 12:00:57: 1.6um 3612 - Spot in the middle

fpurkl at fpurkl at
Fri Jul 15 12:00:58 PDT 2011

4 out of 6 wafers (after running 4 dummies) have a spot in the center of the wafer with supposably less resist when running 1.6um 36112

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