Problem svgcoat2 SNF 2011-07-15 11:26:08: Alarm sounds

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jul 15 14:08:04 PDT 2011


1) Alarm Sound =  Purged Line and  Reposition The sensor,
NO more alarms. 
2) Uniformity = NOticed the dispense hose was way to close to 
wafer , therefore wafers Uniformity was bad , adjusted dispense hose and cycled wafers ( 6 each ) 
all of my wafers came out Good, Uniformity 
Looks Good and theres no spot on the center of the wafers ,
System Ok good to use. 




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