Problem svgcoat2 SNF 2011-07-15 12:00:57: 1.6um 3612 - Spot in the middle

vilanova at vilanova at
Fri Jul 15 14:08:10 PDT 2011

1) Alarm Sound =  Purged Line and  Reposition The sensor,
NO more alarms. 
2) Uniformity = NOticed the dispense hose was way to close to 
wafer , therefore wafers Uniformity was bad , adjusted dispense hose and cycled wafers ( 6 each ) 
all of my wafers came out Good, Uniformity 
Looks Good and theres no spot on the center of the wafers ,
System Ok good to use. 

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