From vilanova at snf.stanford.edu Mon Jun 6 08:04:35 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Jun 2011 08:04:35 -0700 Subject: Comment svgcoat2 SNF 2011-06-06 08:04:34: FOund The system Powered Off Message-ID: Found system powered Off . From vilanova at snf.stanford.edu Mon Jun 6 08:33:54 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Jun 2011 08:33:54 -0700 Subject: Comment svgcoat2 SNF 2011-06-06 08:33:53: System tested and cleaned . Message-ID: System tested and cleaned. From mahnaz at snf.stanford.edu Wed Jun 8 09:40:59 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 09:40:59 -0700 Subject: Problem svgcoat2 SNF 2011-06-08 09:40:59: back side EBR splash Message-ID: Ran 3 wafers and two of the wafers came out with EBR back side splash. From vilanova at snf.stanford.edu Wed Jun 8 11:47:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Jun 2011 11:47:44 -0700 Subject: Problem svgcoat2 SNF 2011-06-08 09:40:59: back side EBR splash Message-ID: Adjusted EBR Canister, cleaned hotplate , catch cup , wafers , belts, Ok to use From vilanova at snf.stanford.edu Fri Jun 10 09:58:03 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:58:03 -0700 Subject: Comment svgcoat2 SNF 2011-06-10 09:58:02: Cleaned! :-) Message-ID: Cleaned catch cup chuck belts and post bake plate, also cleaned all the resist residues from HMDS hotplate , cleaned dummy wafers cycled wafers , Ok to use. back of wafers are clean. From vilanova at snf.stanford.edu Fri Jun 17 09:18:07 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:18:07 -0700 Subject: Comment svgcoat2 SNF 2011-06-17 09:18:06: Replaced Spinner Carriage Belts Message-ID: Replaced Spinner Carriage Tranfers Belts From kvntien at snf.stanford.edu Fri Jun 24 16:33:02 2011 From: kvntien at snf.stanford.edu (kvntien at snf.stanford.edu) Date: Fri, 24 Jun 2011 16:33:02 -0700 Subject: Problem svgcoat2 SNF 2011-06-24 16:33:01: cannot run Message-ID: track 2 is reporting a wafer at the vapour prime stage and will not allow any processing. From cktee at snf.stanford.edu Fri Jun 24 21:38:44 2011 From: cktee at snf.stanford.edu (cktee at snf.stanford.edu) Date: Fri, 24 Jun 2011 21:38:44 -0700 Subject: Problem svgcoat2 SNF 2011-06-24 21:38:44: cannot run Message-ID: alarm sounds after track reset. vp stage not at zero position. From vilanova at snf.stanford.edu Sat Jun 25 10:41:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 25 Jun 2011 10:41:37 -0700 Subject: Problem svgcoat2 SNF 2011-06-24 16:33:01: cannot run Message-ID: Someone POwer Off the Vapor Prime station From the " keypad" Do not Use the keypad!! if you want to reset the track Do it from the PC ,Track has been reseted and Cycled wafers, all Operations are good. From vilanova at snf.stanford.edu Sat Jun 25 10:41:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 25 Jun 2011 10:41:44 -0700 Subject: Problem svgcoat2 SNF 2011-06-24 21:38:44: cannot run Message-ID: Someone POwer Off the Vapor Prime station From the " keypad" Do not Use the keypad!! if you want to reset the track Do it from the PC ,Track has been reseted and Cycled wafers, all Operations are good. From zguo at snf.stanford.edu Tue Jun 28 06:50:40 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Tue, 28 Jun 2011 06:50:40 -0700 Subject: Problem svgcoat2 SNF 2011-06-28 06:50:40: track will not send wafer Message-ID: From vilanova at snf.stanford.edu Tue Jun 28 07:05:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:05:19 -0700 Subject: Problem svgcoat2 SNF 2011-06-28 06:50:40: track will not send wafer Message-ID: tracks back to normal , cycled wafers , ok to use. From mahnaz at snf.stanford.edu Wed Jun 29 13:44:49 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 29 Jun 2011 13:44:49 -0700 Subject: Problem svgcoat2 SNF 2011-06-29 13:44:49: EBR back splash 3612 Message-ID: during asml training all users wafers had that From vilanova at snf.stanford.edu Wed Jun 29 14:33:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Jun 2011 14:33:02 -0700 Subject: Problem svgcoat2 SNF 2011-06-29 13:44:49: EBR back splash 3612 Message-ID: Cleaned Up Dummy wafers, Cleaned dispense hose and chuck , Cycled wafers ( 6 each ) No more BR splashes and Uniformity looks Good. Ok to use. From ehe at snf.stanford.edu Thu Jun 30 18:00:37 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 30 Jun 2011 18:00:37 -0700 Subject: Problem svgcoat2 SNF 2011-06-30 18:00:36: wafer stuck in vapor prime station Message-ID: From ehe at snf.stanford.edu Thu Jun 30 18:28:05 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 30 Jun 2011 18:28:05 -0700 Subject: Comment svgcoat2 SNF 2011-06-30 18:28:04: wafer no longer stuck. Message-ID: track does have repeated problems such as stopping on error message "spindle up?" etc