Comment svgcoat2 SNF 2011-06-10 09:58:02: Cleaned! :-)

vilanova at vilanova at
Fri Jun 10 09:58:03 PDT 2011

Cleaned catch cup chuck belts and post bake plate, also cleaned 
all the resist residues from HMDS hotplate , cleaned dummy wafers
cycled wafers , Ok to use. back of wafers are clean. 

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