Problem svgcoat2 SNF 2011-06-24 16:33:01: cannot run

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sat Jun 25 10:41:37 PDT 2011


Someone POwer Off the Vapor Prime station From the " keypad" 
Do not Use the keypad!! if you want to reset the track Do it from the PC
,Track has been reseted and Cycled wafers, all Operations are good. 




More information about the svgcoat2-pcs mailing list