Problem svgcoat2 SNF 2011-06-29 13:44:49: EBR back splash 3612

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jun 29 14:33:02 PDT 2011


Cleaned Up Dummy wafers, Cleaned dispense hose and chuck ,
Cycled  wafers ( 6 each ) No more BR splashes and Uniformity
looks Good. Ok to use. 




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