From gsosa at snf.stanford.edu Tue Mar 1 15:20:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 15:20:00 -0800 Subject: Shutdown svgcoat2 SNF 2011-03-01 15:19:59: Exhaust problem 3/1 Message-ID: From gsosa at snf.stanford.edu Tue Mar 1 17:28:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 17:28:25 -0800 Subject: Shutdown svgcoat2 SNF 2011-03-01 15:19:59: Exhaust problem 3/1 Message-ID: Solvent exhaust re-adjusted to compensate for reduced flow. Spot checked thickness on 1 micron 3612- All looks ok. Mean: 99210 A Std Dev: 7 A From gsosa at snf.stanford.edu Wed Mar 2 10:14:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Mar 2011 10:14:08 -0800 Subject: Comment svgcoat2 SNF 2011-03-02 10:14:08: Tool Status 3/2 Message-ID: The solvent exhaust system was repaired by facilities maintenance. Static pressure and flow returned to normal levels. Re-adjusted coater bowl exhaust flow back to normal level. Checked 1.0 micron 3612 coating. All looks good. Front and backside EBR look good. Mean: 10191 A Std Dev: 18 A From jparker at snf.stanford.edu Wed Mar 2 13:13:59 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 2 Mar 2011 13:13:59 -0800 Subject: Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner Message-ID: Some shards of broken wafer in spinner trough. Heard 2nd hand that 1 of 5 wafers of lost vacuum and exploded. May be wafer issue, but use caution. From vilanova at snf.stanford.edu Thu Mar 3 09:16:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Mar 2011 09:16:38 -0800 Subject: Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner Message-ID: Removed Broken wafer pieces. cleaned catch cup chuck hotplate belts, Refilled EBR canisters and Emptied Secondary Resist Container ( Carboy ) Cleaned Up dummy wafers and tested System Ok to use. From gsosa at snf.stanford.edu Fri Mar 4 07:33:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Mar 2011 07:33:38 -0800 Subject: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks Message-ID: to archive From bchui at snf.stanford.edu Sun Mar 6 00:15:07 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 6 Mar 2011 00:15:07 -0800 Subject: Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck Message-ID: causing serious mis-centering and possibly wafer breakage. From gsosa at snf.stanford.edu Mon Mar 7 14:13:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:13:20 -0800 Subject: Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck Message-ID: Checked wafer handling by processing wafers with a standard program. Did not have any handling problems. From lindaw at snf.stanford.edu Fri Mar 11 16:26:50 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Mar 2011 16:26:50 -0800 Subject: Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position Message-ID: The load rails that lower wafers onto the vp chuck are stuck in the down position. It looks like it is trying to raise them, but something is stuck. Maybe a piece of the wafer that it broke (when the spin chuck mis-centered my wafer and shattered it in the bowl) is stuck in the innards of the vp chuck assy. Can't see anything obvious. Help? From lindaw at snf.stanford.edu Fri Mar 11 16:31:49 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Mar 2011 16:31:49 -0800 Subject: Shutdown svgcoat2 SNF 2011-03-11 16:31:48: shutdown Message-ID: unable to load wafers because the vp load rails are stuck in the down position From vilanova at snf.stanford.edu Sat Mar 12 11:00:40 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 12 Mar 2011 11:00:40 -0800 Subject: Shutdown svgcoat2 SNF 2011-03-11 16:31:48: shutdown Message-ID: vapor prime rails found on down position , I got it to work again, But please do not power off the system from the main controller If theres a problem with it do a " track reset frpm, the computer" checked and tested . operations all ok , ready to use. From vilanova at snf.stanford.edu Sat Mar 12 11:00:46 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 12 Mar 2011 11:00:46 -0800 Subject: Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position Message-ID: vapor prime rails found on down position , I got it to work again, But please do not power off the system from the main controller If theres a problem with it do a " track reset frpm, the computer" checked and tested . operations all ok , ready to use. From calarrudo at snf.stanford.edu Sat Mar 12 15:07:30 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 12 Mar 2011 15:07:30 -0800 Subject: Comment svgcoat2 SNF 2011-03-12 15:07:29: track 2 coater Message-ID: during coat tool lost vauumn shattered my wafer. From vilanova at snf.stanford.edu Mon Mar 14 08:40:00 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Mar 2011 08:40:00 -0700 Subject: Comment svgcoat2 SNF 2011-03-12 15:07:29: track 2 coater Message-ID: Removed Broken Wafers, Removed and cleaned Up Catch cup , Cleaned Hotplate Belts chuck, Exhaust tubing, tested Using Program # 7 With Vapor Prime , 2mm EBR, System Ok Good to use. From jcdoll at snf.stanford.edu Tue Mar 15 15:30:22 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Tue, 15 Mar 2011 15:30:22 -0700 Subject: Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater Message-ID: EBR came out way off center on a couple of wafers. running a standard program - 1.0um 955 w/ 2mm EBR, no bake. keep an eye on your wafers... From vilanova at snf.stanford.edu Wed Mar 16 08:49:14 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Mar 2011 08:49:14 -0700 Subject: Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater Message-ID: The belts were dirty and Old , Replaced the Coater station Belts, cleaned all dummy wafers ( 12 each ) Ran program # 5 ( 955 Resist 2 mm EBR) everything Ok, Good to use. From jparker at snf.stanford.edu Thu Mar 17 12:09:21 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 17 Mar 2011 12:09:21 -0700 Subject: Comment svgcoat2 SNF 2011-03-17 12:09:21: 2mm EBR offset a bit Message-ID: Small wobble to wafers---maybe 0.5mm more on one side than other. From vilanova at snf.stanford.edu Thu Mar 17 15:06:03 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Mar 2011 15:06:03 -0700 Subject: Comment svgcoat2 SNF 2011-03-17 12:09:21: 2mm EBR offset a bit Message-ID: Checked and Adjusted EBR to 2mm, Cycled wafers , I will run more wafers tomorrow to make sure is still at 2mm. From jasonlin at snf.stanford.edu Fri Mar 18 14:56:05 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 18 Mar 2011 14:56:05 -0700 Subject: Problem svgcoat2 SNF 2011-03-18 14:56:04: Drip at end of coating Message-ID: Running program 7, seems like there was a drip of resist at the end of the coating, leaving a thick spot of resist at center of wafer. From bchui at snf.stanford.edu Sat Mar 19 14:44:56 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 19 Mar 2011 14:44:56 -0700 Subject: Problem svgcoat2 SNF 2011-03-19 14:44:55: mis-centering Message-ID: Wafers are being systematically mis-centered such that a 2mm EBR becomes 4mm on one side and 0mm on the opposite side. From vilanova at snf.stanford.edu Mon Mar 21 09:11:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Mar 2011 09:11:19 -0700 Subject: Problem svgcoat2 SNF 2011-03-18 14:56:04: Drip at end of coating Message-ID: 1)There was no Drip On my wafers while I was coating them It would be useful to know which program was it, But I checked 5,7,8, And all of them are fine suck back is fine On all of them, 2) Adjusted Centering Wafers Tabs lifters , and Cycled wafers, EBR Looks normal all the way around the edge of wafers ,and Uniformity Looks Good, ok to use. From vilanova at snf.stanford.edu Mon Mar 21 09:11:24 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Mar 2011 09:11:24 -0700 Subject: Problem svgcoat2 SNF 2011-03-19 14:44:55: mis-centering Message-ID: 1)There was no Drip On my wafers while I was coating them It would be useful to know which program was it, But I checked 5,7,8, And all of them are fine suck back is fine On all of them, 2) Adjusted Centering Wafers Tabs lifters , and Cycled wafers, EBR Looks normal all the way around the edge of wafers ,and Uniformity Looks Good, ok to use. From jsegal at snf.stanford.edu Wed Mar 23 11:17:44 2011 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Wed, 23 Mar 2011 11:17:44 -0700 Subject: Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin Message-ID: wobbly spin and uneven resist, could not use From vilanova at snf.stanford.edu Thu Mar 24 09:21:32 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Mar 2011 09:21:32 -0700 Subject: Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance ..... Message-ID: System is Under maintenance We need to do some Fine Tuning + adjustments. From vilanova at snf.stanford.edu Thu Mar 24 14:06:52 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Mar 2011 14:06:52 -0700 Subject: Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance ..... Message-ID: Adjusted Spindle, coater arm Catch cup , Adjusted Suck back for 3612 Resist programs, Cycled wafers ( 10 each ) Every wafer came out Good, 2mm EBR Good, Ready to use. From vilanova at snf.stanford.edu Thu Mar 24 14:07:01 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Mar 2011 14:07:01 -0700 Subject: Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin Message-ID: Adjusted Spindle, coater arm Catch cup , Adjusted Suck back for 3612 Resist programs, Cycled wafers ( 10 each ) Every wafer came out Good, 2mm EBR Good, Ready to use.