Comment svgcoat2 SNF 2011-03-02 10:14:08: Tool Status 3/2

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Mar 2 10:14:08 PST 2011

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The solvent exhaust system was repaired by facilities maintenance. Static pressure and flow returned to normal levels. Re-adjusted coater bowl exhaust flow back to normal level. Checked 1.0 micron 3612 coating. All looks good. Front and backside EBR look good.
     Mean: 10191 A
     Std Dev: 18 A

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Next message: Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner
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