Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 3 09:16:38 PST 2011

Previous message: Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner
Next message: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Removed Broken wafer pieces. cleaned catch cup chuck hotplate
belts, Refilled EBR canisters and Emptied Secondary  Resist
Container ( Carboy ) Cleaned Up dummy wafers and tested System
Ok to use.

Previous message: Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner
Next message: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list