Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 3 09:16:38 PST 2011


Removed Broken wafer pieces. cleaned catch cup chuck hotplate
belts, Refilled EBR canisters and Emptied Secondary  Resist
Container ( Carboy ) Cleaned Up dummy wafers and tested System
Ok to use. 




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