Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Mar 6 00:15:07 PST 2011

Previous message: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks
Next message: Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

causing serious mis-centering and possibly wafer breakage.

Previous message: Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks
Next message: Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list