Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position

[lindaw at snf.stanford.edu]

The load rails that lower wafers onto  the vp chuck are stuck in the down position.  It looks like it is trying to raise them, but something is stuck.
Maybe a piece of the wafer that it broke (when the spin chuck mis-centered my wafer and shattered it in the bowl) is stuck in the innards of the vp chuck assy.  Can't see anything obvious.  Help?