Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Mar 11 16:26:50 PST 2011


The load rails that lower wafers onto  the vp chuck are stuck in the down position.  It looks like it is trying to raise them, but something is stuck.
Maybe a piece of the wafer that it broke (when the spin chuck mis-centered my wafer and shattered it in the bowl) is stuck in the innards of the vp chuck assy.  Can't see anything obvious.  Help?




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