Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater

jcdoll at snf.stanford.edu jcdoll at snf.stanford.edu
Tue Mar 15 15:30:22 PDT 2011


EBR came out way off center on a couple of wafers. running a standard program - 1.0um 955 w/ 2mm EBR, no bake. keep an eye on your wafers...




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