Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater

[vilanova at snf.stanford.edu]

 The belts were dirty and Old , Replaced the Coater station Belts, 
cleaned all dummy wafers ( 12 each ) Ran program # 5 
( 955 Resist 2 mm EBR) everything Ok, Good to use.