Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 16 08:49:14 PDT 2011


 The belts were dirty and Old , Replaced the Coater station Belts, 
cleaned all dummy wafers ( 12 each ) Ran program # 5 
( 955 Resist 2 mm EBR) everything Ok, Good to use. 




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