Problem svgcoat2 SNF 2011-03-18 14:56:04: Drip at end of coating

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Mar 18 14:56:05 PDT 2011


Running program 7, seems like there was a drip of resist at the end of the coating, leaving a thick spot of resist at center of wafer.




More information about the svgcoat2-pcs mailing list