Problem svgcoat2 SNF 2011-03-19 14:44:55: mis-centering

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 21 09:11:24 PDT 2011


1)There was no Drip On my wafers while I was coating them
It would be useful  to know which program was it, But I checked  5,7,8, 
And all of them are fine suck back is fine On all of them,
2) Adjusted Centering Wafers Tabs lifters , and Cycled wafers,
 EBR Looks  normal all the way around the edge of wafers ,and
 Uniformity Looks Good, ok to use. 




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