Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance .....

vilanova at vilanova at
Thu Mar 24 14:06:52 PDT 2011

Adjusted Spindle, coater arm Catch cup  , Adjusted Suck back for
3612 Resist programs, Cycled wafers ( 10 each ) Every wafer
 came out Good, 2mm EBR Good, Ready to use. 

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