Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance .....

[vilanova at snf.stanford.edu]

Adjusted Spindle, coater arm Catch cup  , Adjusted Suck back for
3612 Resist programs, Cycled wafers ( 10 each ) Every wafer
 came out Good, 2mm EBR Good, Ready to use.