Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Mar 24 14:07:01 PDT 2011
Adjusted Spindle, coater arm Catch cup , Adjusted Suck back for
3612 Resist programs, Cycled wafers ( 10 each ) Every wafer
came out Good, 2mm EBR Good, Ready to use.
More information about the svgcoat2-pcs
mailing list