Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 24 14:07:01 PDT 2011


Adjusted Spindle, coater arm Catch cup  , Adjusted Suck back for
3612 Resist programs, Cycled wafers ( 10 each ) Every wafer
 came out Good, 2mm EBR Good, Ready to use. 




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