March 2011 Archives by thread

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Starting: Tue Mar 1 15:20:00 PST 2011
Ending: Thu Mar 24 14:07:01 PDT 2011
Messages: 26

• Shutdown svgcoat2 SNF 2011-03-01 15:19:59: Exhaust problem 3/1   gsosa at snf.stanford.edu
  • Shutdown svgcoat2 SNF 2011-03-01 15:19:59: Exhaust problem 3/1   gsosa at snf.stanford.edu
• Comment svgcoat2 SNF 2011-03-02 10:14:08: Tool Status 3/2   gsosa at snf.stanford.edu
• Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner   jparker at snf.stanford.edu
  • Comment svgcoat2 SNF 2011-03-02 13:13:59: Caution, wafer lost in spinner   vilanova at snf.stanford.edu
• Problem svgcoat2 SNF 2011-02-06 17:02:08: similar problem, both tracks   gsosa at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck   bchui at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-06 00:15:06: Wafers sometimes overshooting coat chuck   gsosa at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position   lindaw at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-11 16:26:50: vp load rails stuck in down position   vilanova at snf.stanford.edu
• Shutdown svgcoat2 SNF 2011-03-11 16:31:48: shutdown   lindaw at snf.stanford.edu
  • Shutdown svgcoat2 SNF 2011-03-11 16:31:48: shutdown   vilanova at snf.stanford.edu
• Comment svgcoat2 SNF 2011-03-12 15:07:29: track 2 coater   calarrudo at snf.stanford.edu
  • Comment svgcoat2 SNF 2011-03-12 15:07:29: track 2 coater   vilanova at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater   jcdoll at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-15 15:30:20: wafer overshooting coater   vilanova at snf.stanford.edu
• Comment svgcoat2 SNF 2011-03-17 12:09:21: 2mm EBR offset a bit   jparker at snf.stanford.edu
  • Comment svgcoat2 SNF 2011-03-17 12:09:21: 2mm EBR offset a bit   vilanova at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-18 14:56:04: Drip at end of coating   jasonlin at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-18 14:56:04: Drip at end of coating   vilanova at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-19 14:44:55: mis-centering   bchui at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-19 14:44:55: mis-centering   vilanova at snf.stanford.edu
• Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin   jsegal at snf.stanford.edu
  • Problem svgcoat2 SNF 2011-03-23 11:17:43: "wobbly" spin   vilanova at snf.stanford.edu
• Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance .....   vilanova at snf.stanford.edu
  • Shutdown svgcoat2 SNF 2011-03-24 09:21:31: Under maintenance .....   vilanova at snf.stanford.edu

Last message date: Thu Mar 24 14:07:01 PDT 2011
Archived on: Sun Dec 23 09:24:11 PST 2012

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