Comment svgcoat2 SNF 2011-05-05 14:51:12: 955 0.7 thickness test 5/5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu May 5 14:51:13 PDT 2011


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 7039  Angstroms, Std Dev. 12 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




More information about the svgcoat2-pcs mailing list