Comment svgcoat2 SNF 2011-05-23 09:33:30: 955 0.7 Thickness 5/23

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 23 09:33:30 PDT 2011


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 7015  Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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