Comment svgcoat2 SNF 2011-05-24 17:37:08: thickness and uniformity test

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue May 24 17:37:08 PDT 2011


I did not do yes oven or any sort of prebake before running these wafers.  I did run 4 dummies before coating the good wafer.
1um 3612: avg=10193, std dev=8
1.6um 3612: avg=16975, std dev=10




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