Problem svgcoat2 SNF 2011-05-24 22:53:11: Dot in middle of wafer

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Tue May 24 22:53:12 PDT 2011


Some wafers are showing up with a dot in the middle. I'm running recipe 8 1.6um w/o VP 5mm EBR.




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