Problem svgcoat2 SNF 2011-05-24 22:53:11: Dot in middle of wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed May 25 08:19:13 PDT 2011


Cycled same Recipe ,I noticed that same problem on 3 of my wafers, 
NOticed that Someone had changed the resist bottle therefore
there were some air bubbles in the line, Purged line
cycled all dummy wafers from Box ( 14 Each ) Uniformity Looks Good On all of them , Ok to use. 




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